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This book covers key topics in the emerging field of plasmonic MEMS, with an emphasis on practical aspects. Although readers can find many comprehensive textbooks on electromagnetic waves, nanophotonics and plasmonics, most of these lack the focus needed for a thorough grasp of plasmonic micromachining and MEMS.
This book focuses on an appealing and distinctive aspect of plasmonics, as a tool for patterning and the fabrication of ultra-fine resolution structures. The author reviews the recent developments in plasmonic MEMS and microsystems for biosensing applications, including refractive-index based label-free biosensing, plasmonic integrated lab-on-chip systems, plasmonic for near-field scanning optical microscopy (NSOM) and plasmonics on-chip system for cellular imaging.
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