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Integration of Ferroelectric and Piezoelectric Thin Films

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Integration of Ferroelectric and Piezoelectric Thin Films

Concepts and Applications for Microsystems

Emmanuel Defaÿ

Wiley-ISTE
Publication date : 2013-03-04

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This book contains four parts. The first one is dedicated to concepts. It starts with the definitions and examples of what is piezo-pyro and ferroelectricity by considering the symmetry of the material. Thereafter, these properties are described within the framework of Thermodynamics. The second part described the way to integrate these materials in Microsystems. The third part is dedicated to characterization: composition, structure and a special focused on electrical behaviors. The last part gives a survey of state of the art applications using integrated piezo or/and ferroelectric films.

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About the book

Author

Emmanuel Defaÿ

Imprint

Wiley-ISTE

Collection

n.c

Publication date

2013-03-04

Pages

404 pages

Print ISBN

9781848212398

Language

English

Ebook informations

EAN PDF

9781118616758

Price

£216.86

Copy count 0

Print count 404

File size 6932 Ko

Informations accessibility

EAN EPUB

9781118616604

Price

£216.86

Copy count 0

Print count 404

File size 8387 Ko

Informations accessibility

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About author(s)

Emmanuel Defaÿ

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