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Materials Science in Microelectronics I

Materials Science in Microelectronics I

The Relationships Between Thin Film Processing and Structure

Eugene Machlin

Elsevier Science
Publication date : 2010-07-07

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Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.The first volume of Materials Science in Microelectronics focuses on the first relationship – that between processing and the structure of the thin-film. The state of the thin film's surface during the period that one monolayer exists - before being buried in the next layer – determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure.An ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films.

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About the book

Author

Eugene Machlin

Imprint

Elsevier Science

Collection

n.c

Publication date

2010-07-07

Pages

270 pages

Print ISBN

9780080446400

Language

English

Ebook informations

EAN PDF DRM-FREE

9780080459608

Price

£152.97

Informations accessibility

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About author(s)

Eugene Machlin

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