CMOS - MEMS

Collectif

Wiley-VCH
Collection: Advanced Micro and Nanosystems
Publication date : 2013-03-26

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This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of
MEMS is covered from all angles.

The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first
place, rather than having a hybrid solution.

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About the book

Author

Collectif

Imprint

Wiley-VCH

Collection

Advanced Micro and Nanosystems

Publication date

2013-03-26

Pages

608 pages

Print ISBN

9783527334995

Language

English

Ebook informations

EAN PDF

9783527675067

Price

£80.13

Copy count 0

Print count 608

File size 54979 Ko

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