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CVD of Compound Semiconductors

CVD of Compound Semiconductors

Precursor Synthesis, Developmeny and Applications

Anthony C. Jones, Paul O'brien

Wiley-VCH
Publication date : 2008-11-20

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Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chemistry for the vapor phase deposition of compound semiconductors. Vapor phase methods used for semiconductor deposition and the materials properties that make the organometallic precursors useful in the electronics industry are discussed for a variety of materials.

Topics included:

* techniques for compound semiconductor growth
* metalorganic precursors for III-V MOVPE
* metalorganic precursors for II-VI MOVPE
* single-source precursors
* chemical beam epitaxy
* atomic layer epitaxy

Several useful appendixes and a critically selected, up-to-date list of references round off this practical handbook for materials scientists, solid-state and organometallic chemists, and engineers.

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About the book

Author

Anthony C. Jones , Paul O'Brien

Imprint

Wiley-VCH

Collection

n.c

Publication date

2008-11-20

Pages

352 pages

Print ISBN

9783527292943

Language

English

Ebook informations

EAN PDF

9783527614622

Price

£153.98

Copy count 0

Print count 352

File size 18842 Ko

Informations accessibility

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About author(s)

Anthony C. Jones

Paul O'Brien

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