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Nanofabrication

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Nanofabrication

Principles, Capabilities and Limits

Zheng Cui

Springer
Publication date : 2016-08-10

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This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.

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About the book

Author

Zheng Cui

Imprint

Springer

Collection

n.c

Publication date

2016-08-10

Pages

432 pages

Print ISBN

9783319393599

Language

English

Ebook informations

EAN PDF

9783319393612

Price

£109.99

Copy count 4

Print count 43

File size 22272 Ko

Informations accessibility

EAN EPUB

9783319393612

Price

£109.99

Copy count 4

Print count 43

File size 10783 Ko

Informations accessibility

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About author(s)

Zheng Cui

Zheng Cui, PhD, is a professor at and Director of the Department of Printed Electronics at the Suzhou Institute of Nanotech and Nanobionics, Chinese Academy of Sciences. He received his PhD from Southeast University in Nanjing, China, and has been a Visiting Fellow at the Microelectronics Research Center at Cambridge University, as well as a Senior Scientist and Principal Scientist at Central Microstructure Facility in Rutherford Appleton Laboratory.

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