All ebooks by William Andrew - in PDF and EPUB
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All ebooks by William Andrew in PDF and EPUB


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Download this eBook Handbook of VLSI Microlithography
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Handbook of VLSI Microlithography


John N. Helbert


This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatingsùincluding optical lithography, electron beam, ion beam, and x-ray lithography....

Publication date: 2001-04-01
Format: PDF DRM-free
Publisher: William Andrew
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£189,90

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