All ebooks by Alex Robinson in PDF and EPUB
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All ebooks by Alex Robinson in PDF and EPUB


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Download this eBook Materials and Processes for Next Generation Lithography
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Materials and Processes for Next Generation Lithography


Richard Lawson , Alex Robinson


As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort...

Publication date: 2016-11-08
Format: epub DRM-free
Publisher: Elsevier
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£126,60

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