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SiGe Based Technologies


Erwin Kasper , T.P. Pearsall , Yasuhiro Shiraki


The preparation of silicon germanium microstructures, their physical, chemical and electrical characterization, and their device processing and application are reviewed in this book. Special emphasis is given to ultrathin Si/Ge superlattices. Topics covered include:...

Publication date: 1993-02-18
Format: PDF DRM-free
Publisher: North Holland
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£46,41

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