All ebooks by Ronald J. Gutmann in PDF and EPUB

1 Book(s)


Add to my wish list Chemical Mechanical Planarization of Microelectronic Materials Ronald J. Gutmann , Shyam P. Murarka , Joseph M. Steigerwald Chemical Mechanical Planarization (CMP) plays an important role in today's microelectronics industry. With its ability to achieve global planarization, its universality (material insensitivity), its applicability to multimaterial surfaces, and its relative... Publication date: 2008-09-26 Format: PDF Publisher: Wiley-VCH Add to basket £153,98

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Chemical Mechanical Planarization of Microelectronic Materials

Ronald J. Gutmann , Shyam P. Murarka , Joseph M. Steigerwald

Chemical Mechanical Planarization (CMP) plays an important role in today's microelectronics industry. With its ability to achieve global planarization, its universality (material insensitivity), its applicability to multimaterial surfaces, and its relative...

Publication date: 2008-09-26

Format: PDF

Publisher: Wiley-VCH

Add to basket

£153,98

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