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Beam Processing Technologies


Norman G. Einspruch , Raj N. Singh , S. S. Cohen


Beam Processing Technologies is a collection of papers that deals with the miniaturization of devices that will be faster, consume less power, and cost less per operation or fabrication. One paper discusses metal oxide semiconductor (MOS) integrated circuit technology...

Publication date: 2014-12-01
Format: PDF DRM-free
Publisher: Academic Press
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£68,39

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