All ebooks by Jingsong Wei in PDF and EPUB

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Add to my wish list Laser Heat-Mode Lithography Jingsong Wei This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical... Publication date: 2019-11-20 Format: PDF, ePub Publisher: Springer Collection: Springer Series in Materials Science PDF ePub Add to basket £89,50

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This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical...

Publication date: 2019-11-20

Format: PDF, ePub

Publisher: Springer

Collection: Springer Series in Materials Science

Add to basket

£89,50

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All ebooks by Jingsong Wei in PDF and EPUB

Laser Heat-Mode Lithography

Jingsong Wei