All ebooks in the collection "Microtechnology and MEMS" - Springer

Piezotronics and Piezo-Phototronics

Weiguo Hu , Zhong Lin Wang , Yan Zhang

Co-authored by the discoverer of the piezotronic effect, this book is a fundamental and comprehensive survey of piezotronics and piezo-phototronics. Piezotronics is a term broadly applied to devices fabricated using the piezopotential as a “gate” voltage to tune/control...

Engineering of Micro/Nano Biosystems

Collectif

This tutorial book offers an in-depth overview of the fundamental principles of micro/nano technologies and devices related to sensing, actuation and diagnosis in fluidics and biosystems. Research in the MEMS/NEMS and lab-on-chip fields has seen rapid growth in both...

Advanced Analytical Methods in Tribology

Maria-Isabel De Barros Bouchet , Martin Dienwiebel

This book presents the basics and methods of nanoscale analytical techniques for tribology field. It gives guidance to the application of mechanical, microstructural, chemical characterization methods and topography analysis of materials. It provides an overview of the...

Piezo-Electric Electro-Acoustic Transducers

Larisa Kunickaya , Valeriy Sharapov , Zhanna Sotula

Electroacoustic transducers (EAT) are devices, which transform electric energy to energy of acoustic fluctuations. Principles of action, design of transducers for work in air and water as well as for non-destructive control are described in the book. New technologies of...

Surface Tension in Microsystems

Pierre Lambert

This book describes how surface tension effects can be used by engineers to provide mechanical functions in miniaturized products (<1 mm). Even if precursors of this field such as Jurin or Laplace already date back to the 18th century, describing surface tension...

Piezotronics and Piezo-Phototronics

Zhong Lin Wang

The fundamental principle of piezotronics and piezo-phototronics were introduced by Wang in 2007 and 2010, respectively. Due to the polarization of ions in a crystal that has non-central symmetry in materials, such as the wurtzite structured ZnO, GaN and InN, a...

Capillary Forces in Microassembly

Pierre Lambert

Capillary Forces in Microassembly discusses the use of capillary forces as a gripping principle in microscale assembly. Clearly written and well-organized, this text brings together physical concepts at the microscale with practical applications in...

CMOS Hotplate Chemical Microsensors

Henry P. Baltes , Diego Barrettino , Markus Graf , Andreas Hierlemann

The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design...

Micromechanical Photonics

Hiroo Ukita

This is the most comprehensive book on the basics, realization and applications of micromechanical photonics. Its purpose is to give the engineering student and the practical engineer a systematic introduction to optical MEMS (Micro electro mechanical systems) and...

Fast Simulation of Electro-Thermal MEMS

Tamara Bechtold , Jan G. Korvink , Evgenii B. Rudnyi

Fast Simulation of Electro-Thermal MEMS provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order...

CCD Image Sensors in Deep-Ultraviolet

Flora Li , Arokia Nathan

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV...

Integrated Chemical Microsensor Systems in CMOS Technology

Andreas Hierlemann