All ebooks by Guilei Wang in PDF and EPUB
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All ebooks by Guilei Wang in PDF and EPUB


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Download this eBook Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond
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Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond


Guilei Wang


This thesis presents the SiGe source and drain (S/D) technology in the context of advanced CMOS, and addresses both device processing and epitaxy modelling. As the CMOS technology roadmap calls for continuously downscaling traditional transistor structures,...

Publication date: 2019-09-20
Format: PDF, ePub
Publisher: Springer
Collection: Springer Theses
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£89,50

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