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This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application...
4M 2006 - Second International Conference on Multi-Material Micro Manufacture covers the latest state-of-the-art research results from leading European researchers in advanced micro technologies for batch processing of metals, polymers, and ceramics, and the development...
4M 2005 - First International Conference on Multi-Material Micro Manufacture
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing ...
Die dritte Auflage des mittlerweile zum Standardwerk gereiften Lehrbuchs trägt den rasanten Entwicklungen in diesem interdisziplinären Gebiet umfassend Rechnung. Insbesondere die Kapitel Siliziumtechnik, Materialien und Alternative Technologien wurden stark erweitert....
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