All ebooks by Osamu Tabata in PDF
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All ebooks by Osamu Tabata in PDF


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Download this eBook Reliability of MEMS
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Reliability of MEMS


Osamu Tabata , Toshiyuki Tsuchiya


This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts,...

Publication date: 2013-03-26
Format: PDF
Publisher: Wiley-VCH
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£80,13

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