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4M 2006 - Second International Conference on Multi-Material Micro Manufacture covers the latest state-of-the-art research results from leading European researchers in advanced micro technologies for batch processing of metals, polymers, and ceramics, and the development...
4M 2005 - First International Conference on Multi-Material Micro Manufacture
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing ...
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