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New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI...
In this brief we review several approaches that provide super resolved imaging, overcoming the geometrical limitation of the detector as well as the diffraction effects set by the F number of the imaging lens.In order to obtain the super resolved enhancement, we use...
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