All ebooks by Cheol Seong Hwang in EPUB
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All ebooks by Cheol Seong Hwang in EPUB


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Download this eBook Atomic Layer Deposition for Semiconductors
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Atomic Layer Deposition for Semiconductors


Cheol Seong Hwang , Cheol Seong Hwang


This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines. The section on ALD for memories covers...

Publication date: 2013-10-18
Format: ePub
Publisher: Springer
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£139,50

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