All ebooks by Oleg A. Popov in EPUB

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Add to my wish list High Density Plasma Sources Oleg A. Popov This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered... Publication date: 1996-12-31 Format: epub DRM-free Publisher: William Andrew Add to basket £131,88

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This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered...

Publication date: 1996-12-31

Format: epub DRM-free

Publisher: William Andrew

Add to basket

£131,88

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All ebooks by Oleg A. Popov in EPUB

High Density Plasma Sources

Oleg A. Popov